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SNR Grazing Incidence Soft X-Ray Monochromator
Model SNR-SXR-0.6 is a high aperture (φx = 12.5 mrad), single-element soft x-ray monochromator. The grating has a 100 mm circular aperture with grooves extending to the edge. The distance from (slitless) source to exit slit is 628 mm. The fixed angular deviation of 4.5 degrees and gold coated grating provide efficient reflection to wavelengths as short as λmin = 10 Angstroms in first order and to approximately 6 Angstroms in second order. The spectral resolution is determined by the sagittal apertureφy which may be set by knife-edges at the entrance port or exit slit, over the range of approximately 0 to 30 mrad. A typical setting ofφy = 3 mrad (illuminating 2 mm at the exit slit) provides a fractional spectral resolution of 1/160 at 23Å, 1/68 at 50Å,and 1/33 at 100Å. However, the long wavelength performance is improved considerably by employing an exit slit mask containing 6 slits (100μm wide) at different angles, to match the image tilt over different regions in scanned wavelength. Using the appropriate slit, the spectral resolution is approximately 1/100 over 10~50Å using a 6 mrad sagittal aperture.
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SNR-SXR-0.6 SPECIFICATIONS --------------------------------------- Scan
Geometry ............................................ Hettrick, U.S.
Patent 5,274,435; Spherical Grating Angular
Deviation ...................................... 4.5o
(Fixed). Nominal graze angle of 2.25o Grating
Format ........................................... Gold
Surface; Active Aperture 100 mm Circular Grating
Groove Density .............................
750 g/mm Wavelength
Range ......................................
10~100 Angstroms (m=1); approx. 6~50 Angstroms (m=2), depending on source
intensity. Fractional
Dispersive Resolution (Δλ/λ) ....
0.167/mm (at Source and Exit Slit) Optical
Aberration (image tilt) ...................
Δλ/λ < 0.010 at 6 mrad Sagittal Aperture, 10~50
Angstroms (m=1) Meridional
Aperture / Focusing .................
12.5 mrad (φx),
on Rowland Circle. Sagittal
Aperture ......................................... 0-30 mrad
(φy),
astigmatic. Exit
Slit Width (Vacuum selectable) ..........
200 μm at 0.2o
100 μm at 0.2o (10-13Å)
100 μm at 0.7o (13-20Å)
100 μm at 1.2o (20-28Å)
100 μm at 1.7o (28-37Å)
100 μm at 2.2o ( > 37Å) Exit
Slit Length .......................................... 20
mm External
Drive ............................................ Single
Micro-Stepped Motor with Compumotor ZETA 6104-57-51 Indexer/Drive w/RS232C
Interface Vacuum
Chamber .......................................
Weld-Free 6061 Aluminum, Electroless Nickel Plated; TEFLAT™ Sealed
Knife-edge Ports Entrance
and Exit Ports ..............................
4.5” Knife-edge Flange (ICF114) User
Ports ................................................... Three
Ports Accept 2.75” Knife-edge Flange (ICF63) Length
.........................................................
0.63 meters (Source-Slit) Aperture
Center .......................................... Stationary
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STEVEN SEPVEST CORPORATION |